HIGH PURITY CLEANING PROCESS
Primary Cleaning Process(Oil Free Process) View Detail
High purity cleaning process would be in clean room class 1000.
Ultra pure water cleaning
Resistivity:18MΩ_cm
Hot ultra pure water cleaning
Resistivity:18MΩ_cm
Temp:70-80℃
Temp:70-80℃
Drying
Pure N2 gas (99.999%) blowing
Inspection
1.Surface condition
2.fluid resistivity
3.oil residue
2.fluid resistivity
3.oil residue
EP Packaging (Class 10)
1.Pure N2 gas (99.999%) purging
2.capping on both ends
3.clean double packing
2.capping on both ends
3.clean double packing
