Extra Clean Chambers
IQC
Degreasing
4MΩ DI Water Cleaning
Electro-Polishing
4MΩ DI Water Cleaning
Passivation
4MΩ DI Water Cleaning
Rinsing with DI water
Ultrasonic Cleaning with 4MΩ DI Water
Drying in Oven
Inspection
Packing
